4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Tatsumi Mizutani

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Apparatus for and method of surface treatment for microelectroni

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Method and apparatus for monitoring etching

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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Method and apparatus for treating surface of semiconductor

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method and apparatus for treating surface of semiconductor

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Method for dry-etching

Electric heating – Metal heating – By arc
Patent

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Profile ID: LFUS-PAI-P-507701

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