4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

Takayuki Nishiura

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GaAs semiconductor substrate and fabrication method thereof

Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – In compound semiconductor material
Reexamination Certificate

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GaAs semiconductor substrate for group III-V compound...

Active solid-state devices (e.g. – transistors – solid-state diode – Including semiconductor material other than silicon or... – Group iii-v compound
Reexamination Certificate

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III-V compound semiconductor substrate manufacturing method

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Inspection method of compound semiconductor substrate,...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method of surface treating substrates and method of...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2178820

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