4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Takafumi Tokunaga

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Cleaning liquid for semiconductor devices

Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
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Method and apparatus for treating surface of semiconductor

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Method and apparatus for treating surface of semiconductor

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method for manufacturing a semiconductor integrated circuit...

Semiconductor device manufacturing: process – Making device array and selectively interconnecting
Reexamination Certificate

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Method for processing surface of sample

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-507700

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