4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Tadahiro Ishizaka

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Deposition method for forming a film including metal,...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Diffusion barrier and adhesion layer for an interconnect...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Heat-treating apparatus and heat-treating method

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Integrated substrate processing in a vacuum processing tool

Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate

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Method for depositing a barrier layer on a low dielectric...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2216811

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