4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Swaminathan Sivakumar

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Common plate capacitor array connections, and processes of...

Semiconductor device manufacturing: process – Making passive device
Reexamination Certificate

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Double patterning techniques and structures

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Forming self-aligned nano-electrodes

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Imageable bottom anti-reflective coating for high resolution...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
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Lithography masks for improved line-end patterning

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Profile ID: LFUS-PAI-P-1053062

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