Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
Reexamination Certificate
2007-09-04
2007-09-04
Soward, Ida M. (Department: 2822)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Electromagnetic or particle radiation
C257S464000
Reexamination Certificate
active
10150197
ABSTRACT:
A semiconductor wafer may be coated with an imageable anti-reflective coating. As a result, the coating may be removed using the same techniques used to remove overlying photoresists. This may overcome the difficulty of etching anti-reflective coatings using standard etches because of their poor selectivity to photoresist and the resulting propensity to cause integrated circuit defects arising from anti-reflective coating remnants.
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Derwent-Acc-No. 2003-026401, Derwent-Week 200302, Copyright 1999 Derwent Information Ltd.
Soward Ida M.
Trop Pruner & Hu P.C.
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