Active solid-state devices (e.g., transistors, solid-state diode
Combined with electrical contact or lead
Of specified material other than unalloyed aluminum
Inventor
active
Conductive layer forming method using etching mask with directio
Controlled taper etching
Dry etching suppressing formation of notch
Dry etching with less particles
Interconnection with metal plug and reduced step
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Profile ID: LFUS-PAI-P-65934