4. Coating apparatus
  5. Work holders, or handling devices

Steven N. Lee

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Boat for wafer processing

Supports: racks – Special article – Platelike
Patent

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Contiguous wafer boat

Coating apparatus – Work holders – or handling devices
Patent

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Method of making CMOS devices

Metal working – Method of mechanical manufacture – Assembling or joining
Patent

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Side lifting tool wafer-boat assembly

Coating apparatus – Work holders – or handling devices
Patent

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Side lifting wafer boat assembly

Coating apparatus – Work holders – or handling devices
Patent

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Profile ID: LFUS-PAI-P-652768

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