Side lifting wafer boat assembly

Details Side lifting wafer boat assembly Side lifting wafer boat assembly

1984-08-13

1986-02-25

Morgenstern, Norman

Coating apparatus

Work holders, or handling devices

118728, 211 41, 206454, 206328, 432253, B05C 1302

Patent

active

045721017

ABSTRACT:
A side lifting wafer boat assembly is provided comprising a wafer supporting boat and boat lifting tool. The boat lifting tool is detachably engageable along the length of a boat. The tool is designed to permit sideway engagement with boats specifically designed for side lifting, or with boats that may also be end lifted, using a fork-like member which engages elongated pickup tubes.

REFERENCES:
patent: 765674 (1904-07-01), Normandin
patent: 3701558 (1972-10-01), Baker
patent: 3819067 (1974-06-01), Hammond
patent: 3861733 (1975-01-01), Vander Mey
patent: 3939973 (1976-02-01), Wallestad
patent: 4256229 (1981-03-01), Lee
patent: 4412812 (1983-11-01), Sadowski et al.
patent: 4439146 (1984-03-01), Sugita
patent: 4477114 (1984-10-01), Callis
Meyers, "Detachable Handle Grip", IBM Tech. Disclosure Bulletin, vol. 19, No. 3, Aug. 1976, pp. 949-950.

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