Supports: racks – Special article – Platelike
Patent
1979-09-17
1981-03-17
Kaplan, Morris
Supports: racks
Special article
Platelike
B05C 1302
Patent
active
042562295
ABSTRACT:
A boat for use in wafer processing technology such as associated with semiconductor wafers. The boat consists of a relatively flat bottom plate having a plurality of substantially parallel V-cut notches therein on which the bottom of the wafer rests and two parallel side rails disposed above and on either side of the flat bottom plate for holding the sides of the wafer. The two side rails includes a plurality of opposed U-shaped notches cut in parallel along the inner surface of the side rails for movably securing the opposite side edges of the wafer placed in the boat. Each pair of opposed U-shaped notches being offset with respect to a V-cut notch operatively associated therewith. Such boats are applicable to wafer handling areas including oxidation, diffusion, low pressure chemical vapor deposition (LPCVD), plasma etching, chemical etching, photoresist coating, baking, stripping, ultrasonic cleaning, and other automatic wafer handling operations. In addition to applicability to semiconductor processing technology, the boat is also applicable to other electronic processing technology such as the processing of magnetic bubble substrate materials.
REFERENCES:
patent: 3553037 (1971-01-01), Bell
patent: 3826377 (1974-07-01), Bachmann
patent: 3834349 (1974-09-01), Dietze et al.
patent: 3923156 (1975-12-01), Wallestad
patent: 4176751 (1979-12-01), Gillissie
IBM Technical Disclosure Bulletin, vol. 19, No. 10, (Mar. 1977), pp. 3734-3735, Clark et al., "Wafer Holder".
Caldwell Wilfred G.
Hamann H. Fredrick
Kaplan Morris
McGlynn Daniel R.
Rockwell International Corporation
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