Contiguous wafer boat

Details Contiguous wafer boat Contiguous wafer boat

1983-05-13

1985-05-07

Smith, John D.

Coating apparatus

Work holders, or handling devices

118728, 432253, 211 41, B05C 1302

Patent

active

045151040

ABSTRACT:
A quartz boat is formed with a plurality of spaced, parallel rods having slots for supporting a series of semi-conductor wafers in a generally edgewise, spaced, parallel position. The slots continue to the ends of the rods, and the cross members supporting the rods are spaced inwardly from the rod ends, such that a series of boats may be arranged with the rods in end-to-end relation and the wafer space between adjacent boats is the same as the wafer space in the middle of a boat. The boat is also provided with a pair of tubes parallel to the rods for receiving a pickup fork.

REFERENCES:
patent: 3534862 (1970-10-01), Shambelan
patent: 3819067 (1974-06-01), Hammond
patent: 3828726 (1974-08-01), Dietz et al.
patent: 4389967 (1983-06-01), Shimoda et al.
patent: 4412812 (1983-11-01), Sadowski et al.
Worden Quartz Products, Inc. product literature (2 sheets), Houston, Texas, publication date unknown.

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