Side lifting tool wafer-boat assembly

Details Side lifting tool wafer-boat assembly Side lifting tool wafer-boat assembly

1989-04-19

1991-07-23

Chiesa, Richard L.

Coating apparatus

Work holders, or handling devices

118728, 211 41, 432261, B05C 1302

Patent

active

050334069

ABSTRACT:
A side lifting boat and a tool assembly is disclosed. The tool is detachably engageable to selectively lift a boat. Both boat and tool are anti-rotationally engageable by the tool's upper and lower projections at its forward end fitting into a correspondingly shaped space defined between the outer (non-wafer-carrying) surface on the side of the boat. The boat's corresponding space permits the lifting tool to be moved into the space and into position between two fulcrum points that stabilize the boat/tool assembly from anything other than a small relative angular rotation.

REFERENCES:
patent: 4355974 (1982-10-01), Lee
patent: 4439146 (1984-03-01), Sugita
patent: 4484538 (1984-11-01), Sarkozy et al.
patent: 4515104 (1985-05-01), Lee
patent: 4572101 (1986-02-01), Lee
patent: 4841906 (1989-06-01), de Geest, Jr.

Affiliated with

Also associated with

Rating

Side lifting tool wafer-boat assembly does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Side lifting tool wafer-boat assembly, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Side lifting tool wafer-boat assembly will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-425928