4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Insulative material deposited upon semiconductive substrate

Simon McClatchie

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Apparatus and method for distributing a polishing fluid

Abrading – Abrading process – Abradant supplying
Reexamination Certificate

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Method and apparatus of a variable height and controlled...

Abrading – Precision device or process - or with condition responsive... – With feeding of tool or work holder
Reexamination Certificate

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Methods and apparatus for treating a semiconductor substrate

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Methods and systems for a stress-free cleaning a surface of...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Methods of and apparatus for controlling polishing surface...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
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Profile ID: LFUS-PAI-P-2043302

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