4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Shunji Kubo

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Method for manufacturing a semiconductor device

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Semiconductor device and method of fabricating the same

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Semiconductor device and method of manufacturing same

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Semiconductor device having a capacitor and method of...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Semiconductor device having a capacitor with increased...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Profile ID: LFUS-PAI-P-400814

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