4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Metal coating

Seshadri Ganguli

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Apparatus and process for plasma-enhanced atomic layer...

Coating apparatus – Gas or vapor deposition
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Apparatus for providing gas to a processing chamber

Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor
Reexamination Certificate

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Chemical delivery apparatus for CVD or ALD

Fluid handling – Diverse fluid containing pressure systems – Gas pressure storage over or displacement of liquid
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Chemical delivery apparatus for CVD or ALD

Fluid handling – Systems – With flow control means for branched passages
Reexamination Certificate

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Chemical precursor ampoule for vapor deposition processes

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – With means for measuring – testing – or sensing
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Profile ID: LFUS-PAI-P-1340451

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