Fluid handling – Diverse fluid containing pressure systems – Gas pressure storage over or displacement of liquid
Reexamination Certificate
2007-10-26
2009-08-04
Lee, Kevin L (Department: 3753)
Fluid handling
Diverse fluid containing pressure systems
Gas pressure storage over or displacement of liquid
C137S240000
Reexamination Certificate
active
07568495
ABSTRACT:
Embodiments described herein provide ampoule assemblies to contain, store, or dispense chemical precursors. In one embodiment, an ampoule assembly is provided which includes an ampoule containing a first material layer disposed on the outside of the ampoule and a second material layer disposed over the first material layer, wherein the first material layer is thermally more conductive than the second material layer, an inlet line in fluid communication with the ampoule and containing a first manual shut-off valve disposed therein, an outlet line in fluid communication with the ampoule and containing a second manual shut-off valve disposed therein, and a first bypass line connected between the inlet line and the outlet line. In some embodiments, the ampoule assembly may contain disconnect fittings. In other embodiments, the first bypass line has a shut-off valve disposed therein to fluidly couple or decouple the input line and the outlet line.
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International Search Report and Written Opinion dated Oct. 2, 2008 for International Application No. PCT/US07/64276.
Chu Schubert S.
Ganguli Seshadri
Ma Paul
Marcadal Christophe
Nakashima Norman
Applied Materials Inc.
Lee Kevin L
Patterson & Sheridan LLP
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