Active solid-state devices (e.g., transistors, solid-state diode
Combined with electrical contact or lead
Of specified material other than unalloyed aluminum
Inventor
active
Copper recess process with application to selective capping...
Copper recess process with application to selective capping...
Manufacturable CoWP metal cap process for copper interconnects
Manufacturable CoWP metal cap process for copper interconnects
Very low effective dielectric constant interconnect...
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