4. Fishing, trapping, and vermin destroying

Rosemary L. S. Pike

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Add one process step to control the SI distribution of Alsicu to

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Adding SF.sub.6 gas to improve metal undercut for hardmask metal

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Aluminum plug process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Apparatus and method for planarization of spin-on materials

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Utilizing reflow
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Approaches to integrate the deep contact module

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Profile ID: LFUS-PAI-P-131611

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