Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
Inventor
active
BARC etch comprising a selective etch chemistry and a high...
Dry etch process for small-geometry metal gates over thin...
Dual damascene pattern liner
Electron beam preionization of a high pressure self-sustaining g
Etch back of interconnect dielectrics
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Profile ID: LFUS-PAI-P-1248309