4. Photocopying
  5. Projection printing and copying cameras
  6. Step and repeat

Robert John Socha

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Assist features for use in lithographic projection

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Illumination optimization for specific mask patterns

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
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Lithographic apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Method, program product and apparatus for model based...

Computer-aided design and analysis of circuits and semiconductor – Design of semiconductor mask or reticle
Reexamination Certificate

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Method, program product and apparatus for model based...

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2417883

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