Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
Inventor
active
Development of poly(1-methyl-1-cyclopentene-SO.sub.2) electron b
Method of preparing a pattern on a silicon wafer
Method of transferring a surface relief pattern from a poly(olef
Olefin-SO.sub.2 copolymer film adhesion to a substrate
Photoresist containing a thiodipropionate compound
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Profile ID: LFUS-PAI-P-1131847