Development of poly(1-methyl-1-cyclopentene-SO.sub.2) electron b

Details Development of poly(1-methyl-1-cyclopentene-SO.sub.2) electron b Development of poly(1-methyl-1-cyclopentene-SO.sub.2) electron b

1975-01-09

1976-01-27

Newsome, J. H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

96 351, 96 362, 96 48R, 96115R, 20415914, 260 793A, 346 74CR, 346135, 427 44, 427273, 427350, B05D 306, G11B 900

Patent

active

039353320

ABSTRACT:
Three developer solvents 2-methylcyclohexanone, 3-methylcyclohexanone, and a mixture of acetonyl acetate and acetone, improve the resolution of electron beam exposed films of poly(1-methyl-1-cyclopentene-SO.sub.2) copolymers.

REFERENCES:
patent: 3576791 (1971-04-01), Holler et al.
patent: 3723591 (1973-03-01), Bauer et al.
patent: 3884696 (1975-05-01), Bowden et al.
Thompson et al., "J. Electrochem. Soc." Vol. 120 No. 12 Dec. 1973 pp. 1722-1726.

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