Development of poly(1-methyl-1-cyclopentene-SO.sub.2) electron b

Details Development of poly(1-methyl-1-cyclopentene-SO.sub.2) electron b Development of poly(1-methyl-1-cyclopentene-SO.sub.2) electron b

Filed on

1975-01-09

Date issued

1976-01-27

Examiner

Newsome, J. H.

Patent Class

Coating processes

SubClass

Electrical product produced

SubSubClass

Integrated circuit, printed circuit, or circuit board

Other Related Categories

96 351, 96 362, 96 48R, 96115R, 20415914, 260 793A, 346 74CR, 346135, 427 44, 427273, 427350, B05D 306, G11B 900

Type

Patent

Status

active

Patent number

039353320

Description

ABSTRACT:
Three developer solvents 2-methylcyclohexanone, 3-methylcyclohexanone, and a mixture of acetonyl acetate and acetone, improve the resolution of electron beam exposed films of poly(1-methyl-1-cyclopentene-SO.sub.2) copolymers.

REFERENCES:
patent: 3576791 (1971-04-01), Holler et al.
patent: 3723591 (1973-03-01), Bauer et al.
patent: 3884696 (1975-05-01), Bowden et al.
Thompson et al., "J. Electrochem. Soc." Vol. 120 No. 12 Dec. 1973 pp. 1722-1726.

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