Method of transferring a surface relief pattern from a poly(olef

Details Method of transferring a surface relief pattern from a poly(olef Method of transferring a surface relief pattern from a poly(olef

1976-07-30

1977-08-30

Mack, John H.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

96 351, 96 36, 96 362, 20415922, 427 43, C23C 1500

Patent

active

040453189

ABSTRACT:
This invention pertains to a method of transferring a surface relief pattern from a poly(olefin sulfone) layer to a metal layer wherein the poly(olefin sulfone) layer is exposed to ultra violet radiation prior to sputter etching the surface relief pattern into the metal layer.

REFERENCES:
patent: 3733258 (1973-05-01), Hanak et al.
patent: 3782940 (1974-01-01), Ohto et al.
patent: 3860783 (1975-01-01), Schmidt et al.
patent: 3875026 (1975-04-01), Widmer
patent: 3884696 (1975-05-01), Bowden et al.
patent: 3893127 (1975-07-01), Kaplan et al.
patent: 3898350 (1975-08-01), Gipstein et al.
patent: 3916036 (1975-10-01), Gipstein et al.
patent: 3935331 (1976-01-01), Poliniak et al.
patent: 3935332 (1976-01-01), Poliniak et al.
patent: 3964909 (1976-06-01), Himics et al.
M. J. Bowden et al., "Poly(Styrene Sulfone)-A Sensitive Ion-Millable Positive Electron Beam Resist," J. Electrochem. Soc., vol. 121, pp. 1620-1623 (1974).
M. J. Bowden et al., "Electron Irradiation of Poly(olefin sulfones), Application to Electron Beam Resists," J. Appl. Polymer Sci., vol. 17, pp. 3211-3224 (1973).
L. F. Thompson et al., "A New Family of Positive Electron Beam Resists-" Poly(olefin sulfones)," J. Electrochem. Soc., vol 120, pp. 1722-1726 (1973).

Affiliated with

Also associated with

Rating

Method of transferring a surface relief pattern from a poly(olef does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of transferring a surface relief pattern from a poly(olef, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of transferring a surface relief pattern from a poly(olef will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-960927