Olefin-SO.sub.2 copolymer film adhesion to a substrate

Details Olefin-SO.sub.2 copolymer film adhesion to a substrate Olefin-SO.sub.2 copolymer film adhesion to a substrate

1975-07-28

1977-02-08

Kendall, Ralph S.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427250, 427405, 427 79, 204 38E, 204 38B, 358 4, 358301, 346 1, H04N 582

Patent

active

040072959

ABSTRACT:
To improve the adherence of an olefin-SO.sub.2 copolymer film employed as an electron beam resist to a metallic substrate, a thin film of gold is first applied to the substrate. The resulting bond is strong enough to withstand exposure to electron beams, development of the resist film and electroplating of the film witout undercutting, lifting or distortion of the film.

REFERENCES:
patent: 3795534 (1974-03-01), Mehalso et al.
patent: 3882214 (1975-05-01), Nosker et al.
patent: 3893127 (1975-07-01), Kaplan et al.
patent: 3935331 (1976-01-01), Poliniak et al.
patent: 3935332 (1976-01-01), Poliniak et al.

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