4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Reza Sadjadi

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Combined resist strip and barrier etch process for dual...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Electrically enhancing the confinement of plasma

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus
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In-situ plug fill

Etching a substrate: processes – Etching and coating occur in the same processing chamber
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Magnetic enhancement for mechanical confinement of plasma

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
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Magnetic enhancement for mechanical confinement of plasma

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Profile ID: LFUS-PAI-P-2653107

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