Single-crystal, oriented-crystal, and epitaxy growth processes;
Forming from vapor or gaseous state
With decomposition of a precursor
Inventor
active
Device and a method for epitaxially growing objects by CVD
Device and a method for epitaxially growing objects by CVD
Device for epitaxially growing objects
Device for epitaxially growing objects and method for such a gro
Device for heat treatment of objects and a method for producing
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