4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Article handling

Novellus Systems Inc.

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Absorptive filter for semiconductor processing systems

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Active rinse shield for electrofill chemical bath and method...

Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Reexamination Certificate

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Active rinse shield for electrofill chemical bath and method...

Cleaning and liquid contact with solids – Apparatus – With non-impelling fluid deflector or baffle other than...
Reexamination Certificate

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Adhesion of tungsten nitride films to a silicon surface

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Adhesion of tungsten nitride films to a silicon surface

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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