Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Reexamination Certificate
2006-10-19
2008-08-19
Perrin, Joseph L. (Department: 1792)
Cleaning and liquid contact with solids
Processes
With work or work parts movable during treatment
C134S042000, C049S041000, C049S044000, C049S068000, C049S073100, C251S212000
Reexamination Certificate
active
07413616
ABSTRACT:
An active rinse shield designed to protect electrofill chemical baths from excessive dilution during rinse sprays on the semiconductor wafer. The shield uses overlapping blades to cover the bath, making a physical barrier between the bath chemistry and the wafer rinse water. The blades are interconnecting ribs that actuate around a common pivot axis. A linear mechanical actuator controls the blade movement, moving the top-most blade, which in turn, moves an adjacent lower blade. Each upper blade is interconnected to an adjacent lower blade by upper and lower ledges, a pivot boss and interlocking cut, and a curved ledge on each blade's body surface. The interconnecting features allow the blades to move one another out for extension or in for retraction. The interlocking blades are inclined above one another, forming grooves to redirect the rinse water away from the chemical bath.
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Breiling Patrick
Rasberry John D
Schlegel Steve C
Curcio Robert
DeLio & Peterson LLC
Novellus Systems Inc.
Perrin Joseph L.
Watson Joy
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