4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Naoto Tsuji

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Gas-shield electron-beam gun for thin-film curing application

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate

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Interlayer insulation film used for multilayer interconnect...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method and apparatus for preparing a silicon oxide film

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Method for forming dielectric film using porogen gas

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate

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Method for forming dielectric SiOCH film having chemical...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1859918

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