4. Optics: measuring and testing
  5. Inspection of flaws or impurities
  6. Surface condition

Moon-Kyung Kim

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CMOS thin film transistor comprising common gate, logic...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Electro-mechanical transistor

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Method and apparatus for inspecting a wafer surface

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Method and apparatus for inspecting defects

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Method and apparatus for inspecting target defects on a wafer

Optics: measuring and testing – By configuration comparison – With projection on viewing screen
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3059012

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