Method and apparatus for inspecting defects

Details Method and apparatus for inspecting defects Method and apparatus for inspecting defects

2007-09-18

2007-09-18

Stafira, Michael P. (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237400, C356S237500

Reexamination Certificate

active

10903852

ABSTRACT:
In a method for inspecting a defect in accordance with one aspect of the present invention, an object is divided into a plurality of regions. Reflectivity of each of the plurality of regions is obtained. Amplification ratio for each region is determined using the reflectivity. A light is irradiated onto the regions. A light reflected from a first region is amplified by a first amplification ratio that is determined for the first region. Moving the irradiated light from the first region to a second region is detected. A light reflected from the second region is amplified by a second amplification ratio that is determined for the second region. The amplified lights from the first region and the second region are analyzed to determine an existence of a defect on the object.

REFERENCES:
patent: 4902131 (1990-02-01), Yamazaki et al.
patent: 5105092 (1992-04-01), Natsubori et al.
patent: 6496256 (2002-12-01), Eytan et al.
patent: 6833913 (2004-12-01), Wolf et al.
patent: 06-249791 (1994-09-01), None
patent: 1988-0000750 (1983-12-01), None
patent: 1020020030674 (2002-04-01), None
English language abstract of Korean Publication No. 1988-0000750.
English language abstract of Korean Publication No. 1020020030674.
English language abstract of Japanese Publication No. 06-249791 , Sep. 9, 1994.

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