Electro-mechanical transistor

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C257S415000, C257SE29040, C257SE29324

Reexamination Certificate

active

08080839

ABSTRACT:
An electro-mechanical transistor includes a source electrode and a drain electrode spaced apart from each other. A source pillar is between the substrate and the source electrode. A drain pillar is between the substrate and the drain electrode. A moveable channel is spaced apart from the source electrode and the drain electrode. A gate nano-pillar is between the moveable channel and the substrate. A first dielectric layer is between the moveable channel and the gate nano-pillar. A second dielectric layer is between the source pillar and the source electrode. A third dielectric layer is between the drain pillar and the drain electrode.

REFERENCES:
patent: 4893156 (1990-01-01), Karasawa
patent: 5702281 (1997-12-01), Huang et al.
patent: 5710478 (1998-01-01), Kanemaru et al.
patent: 6946693 (2005-09-01), Scheible et al.
patent: 7214571 (2007-05-01), Scheible et al.
patent: 7355258 (2008-04-01), Valenzuela
patent: 7414437 (2008-08-01), Blick et al.
patent: 2006/0011998 (2006-01-01), Scheible et al.
patent: 2008/0049491 (2008-02-01), Park
patent: 2008/0061351 (2008-03-01), Jang et al.
patent: 2010/0032739 (2010-02-01), Lindholm et al.
patent: 2010/0171569 (2010-07-01), Ionescu et al.
patent: 10-0745769 (2007-07-01), None
patent: 10-0807222 (2008-02-01), None
English Abstract for Publication No. 10-0745769.
English Abstract for Publication No. 1020080017784 (for 10-0807222).

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