4. Semiconductor device manufacturing: process
  5. Forming bipolar transistor by formation or alteration of...
  6. Self-aligned

Min Yong Lee

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Apparatus and method for partial ion implantation

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Gate structure of semiconductor device

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Method for manufacturing a semiconductor device

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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Method for manufacturing semiconductor device

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Method of fabricating a semiconductor device including ion...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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