4. Semiconductor device manufacturing: process
  5. Making field effect device having pair of active regions...
  6. Having insulated gate

Michael P. Chudzik

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Combined stepper and deposition tool

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Deep trench (DT) metal-insulator-metal (MIM) capacitor

Semiconductor device manufacturing: process – Making passive device – Trench capacitor
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Direct contact between high-κ/metal gate and wiring...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Dual metal and dual dielectric integration for metal high-k...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Dual metal gate self-aligned integration

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Profile ID: LFUS-PAI-P-2194638

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