Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
Inventor
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Combined stepper and deposition tool
Deep trench (DT) metal-insulator-metal (MIM) capacitor
Direct contact between high-κ/metal gate and wiring...
Dual metal and dual dielectric integration for metal high-k...
Dual metal gate self-aligned integration
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Profile ID: LFUS-PAI-P-2194638