Combined stepper and deposition tool

Details Combined stepper and deposition tool Combined stepper and deposition tool

2011-01-18

2011-01-18

Smith, Zandra (Department: 2895)

Semiconductor device manufacturing: process

Chemical etching

Combined with coating step

C438S671000, C438S700000, C438S703000, C438S708000

Reexamination Certificate

active

07871933

ABSTRACT:
A stepper is combined with hardware that deposits a layer of material in the course of forming an integrated circuit, thus performing the deposition, patterning and cleaning without exposing the wafer to a transfer between tools and combining the function of three tools in a composite tool. The pattern-defining material is removed by the application of UV light through the mask of the stepper, thereby eliminating the bake and development steps of the prior art method. Similarly, a flood exposure of UV eliminates the cleaning steps of the prior art method.

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