Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
Inventor
active
CMOS transistor junction regions formed by a CVD etching and...
CMOS transistor junction regions formed by a CVD etching and...
Hydrogen ambient process for low contact resistivity PdGe contac
Method for forming an integrated circuit
Method for forming an integrated circuit
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