4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Maureen R. Brongo

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Apparatus for high-resolution in-situ plasma etching of...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Damascene interconnect structure and fabrication method...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Fabrication of high-density capacitors for mixed signal/RF...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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IC interconnect structures and methods for making same

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Interconnect with low dielectric constant insulators for...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
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Profile ID: LFUS-PAI-P-2035324

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