4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Masuo Tanno

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Dry-etching apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Dry-etching method

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
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Method for transporting/storing a wafer in a wafer carrier

Package making – Methods – Filling preformed receptacle and closing
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Method for transporting/storing wafer and wafer carrier

Special receptacle or package – For holding a machine readable recording medium – For holding a grooved phonograph disc
Patent

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Plasma doping method

Fishing – trapping – and vermin destroying
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Profile ID: LFUS-PAI-P-108162

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