Etching a substrate: processes
Gas phase etching of substrate
Application of energy to the gaseous etchant or to the...
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Formation of doped regions and/or ultra-shallow junctions in...
Method and apparatus for improved processing with a...
Method and system for directional growth using a gas cluster...
Method for patterning and etching film layers of semiconductor d
Methods of forming doped and un-doped strained semiconductor...
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