Radiant energy – Ion generation – Field ionization type
Reexamination Certificate
2006-06-13
2006-06-13
Nguyen, Kiet T. (Department: 2881)
Radiant energy
Ion generation
Field ionization type
C250S424000
Reexamination Certificate
active
07060989
ABSTRACT:
Apparatus and methods for improving processing of workpieces with gas-cluster ion beams and modifying the gas-cluster ion energy distribution in the GCIB. In a reduced-pressure environment, generating an energetic gas-cluster ion beam and subjecting the beam to increased pressure region.
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Gwinn Matthew C.
Hautala John J.
Mack Michael E.
Swenson David R.
Tabat Martin D.
Cohen Jerry
Epion Corporation
Hamilton John A.
Nguyen Kiet T.
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