4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...

Maosheng Zhao

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Cleaning of CVD chambers using remote source with cxfyoz...

Cleaning and liquid contact with solids – Processes – Hollow work – internal surface treatment
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Computer-readable medium that contains software for...

Coating apparatus – Control means responsive to a randomly occurring sensed...
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Heated gas distribution plate for a processing chamber

Coating apparatus – Gas or vapor deposition
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Method and apparatus for cleaning a CVD chamber

Coating apparatus – Gas or vapor deposition – With treating means
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Method for cleaning a CVD chamber

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Profile ID: LFUS-PAI-P-2701079

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