4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Manabu Iguchi

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Apparatus for forming films of a semiconductor device, a method

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Forming method of copper interconnection and semiconductor...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method for manufacturing a multilayer interconnection structure

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method for manufacturing semiconductor device, and...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Method of manfacturing semiconductor device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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