4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Makoto Ando

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Plasma device and plasma generating method

Electric heating – Metal heating – By arc
Reexamination Certificate

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Plasma device and plasma generating method

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Plasma device and plasma generating method

Communications: radio wave antennas – Antennas – Having electric space discharge device
Reexamination Certificate

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Plasma processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Slot array antenna and plasma processing apparatus

Communications: radio wave antennas – Antennas – Slot type
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Profile ID: LFUS-PAI-P-370656

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