Communications: radio wave antennas – Antennas – Slot type
Reexamination Certificate
2006-04-04
2006-04-04
Chen, Shih-Chao (Department: 2821)
Communications: radio wave antennas
Antennas
Slot type
C156S345420
Reexamination Certificate
active
07023393
ABSTRACT:
A slot array antenna, consistent with the invention can include a power feeding waveguide for feeding microwave power and a plurality of rectangular radiating waveguides. The plurality of rectangular radiating waveguides are connected to a plurality of windows which are disposed along the longitudinal direction of the power feeding waveguide so as to guide the microwave power from the plurality of windows to the outside of the antenna. In each of the radiating waveguides, the interval “d” between the centers of gravity of slot pairs or slots is substantially the same as the wavelength λm of the microwave in the rectangular radiating waveguide. A slot array antenna of the present invention can be used in a plasma processing apparatus to increase the plasma density in the plasma-processing chamber.
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English translation of Office Action dated Jan. 4, 2005, issued from the Japanese Patent Office for Japanese Patent Application No. 2002-314623, filed Oct. 29, 2002.
Takahashi et al., “The Suppression of the Reflection by an Inductive Wall of a Power Divider for a Slotted Waveguide Array,” The Institute of Electronics Information and Communication Engineers, Technical Report of IEICE, A-P94-7 (1994) pp. 45-50.
Ando Makoto
Ishii Nobuo
Takahashi Masaharu
Ando Makoto
Chen Shih-Chao
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Takahashi Masaharu
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