Plasma device and plasma generating method

Details Plasma device and plasma generating method Plasma device and plasma generating method

2005-06-28

2005-06-28

Van, Quang T. (Department: 3742)

Electric heating

Metal heating

By arc

C156S345410, C118S7230MW

Reexamination Certificate

active

06911617

ABSTRACT:
A desired component of an electromagnetic field in a slot antenna is selectively taken to be supplied into a vessel for generating a plasma. The angle of inclination of slots (36) relative to the circumferential direction of a radiation surface (31) of the slot antenna (30) is decreased as the position of the slots approaches the periphery of the radiation surface31from the center O of the radiation surface.

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patent: 2001-345312 (2001-12-01), None
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