Plasma device and plasma generating method

Details Plasma device and plasma generating method Plasma device and plasma generating method

2005-11-22

2005-11-22

Wong, Don (Department: 2821)

Communications: radio wave antennas

Antennas

Having electric space discharge device

C343S770000

Reexamination Certificate

active

06967622

ABSTRACT:
A plasma apparatus includes a slot antenna (30) supplying an electromagnetic field to a container in which plasma is generated. Slot antenna (30) has a slot (36) so formed that a radiation plane (31) at a periphery B thereof allows the electromagnetic field to provide radiation smaller per unit area in amount than at an intermediate region C thereof located between a center A and periphery B thereof.

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