4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Majeed A. Foad

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Boron ion sources for ion implantation apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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In-situ dose monitoring using optical emission spectroscopy

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Reexamination Certificate

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Method for measuring dopant concentration during plasma ion...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Method of controlling metal silicide formation

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Method of ultra-shallow junction formation using Si film...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1864612

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