4. Computer-aided design and analysis of circuits and semiconductor
  5. Design of semiconductor mask or reticle
  6. Layout generation

Luca Grella

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Apparatus and method for tilted particle-beam illumination

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Calibration standards and methods

Active solid-state devices (e.g. – transistors – solid-state diode – Incoherent light emitter structure – Encapsulated
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Calibration standards and methods

Active solid-state devices (e.g. – transistors – solid-state diode – Incoherent light emitter structure – Encapsulated
Reexamination Certificate

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E-beam detection of defective contacts/vias with flooding...

Radiant energy – Electron energy analysis
Reexamination Certificate

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Electron beam patterning

Computer-aided design and analysis of circuits and semiconductor – Design of semiconductor mask or reticle – Layout generation
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2174940

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