E-beam detection of defective contacts/vias with flooding...

Details E-beam detection of defective contacts/vias with flooding... E-beam detection of defective contacts/vias with flooding...

2006-03-28

2006-03-28

Wells, Nikita (Department: 2881)

Radiant energy

Electron energy analysis

C250S310000, C250S306000, C250S307000, C250S397000, C250S492200, C250S252100

Reexamination Certificate

active

07019292

ABSTRACT:
One embodiment disclosed relates to a method for robustly detecting a defective high aspect ratio (HAR) feature. A surface area of a semiconductor specimen with HAR features thereon is charged up, and a primary beam is impinged onto the surface area. Scattered electrons that are generated due to the impingement of the primary beam are extracted from the surface area. An energy filter is applied to remove the scattered electrons with lower energies, and the filtered electrons are detected. Image data is generated from the detected electrons, and an intensity threshold is applied to the image data.

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