Active solid-state devices (e.g. – transistors – solid-state diode – Incoherent light emitter structure – Encapsulated
Reexamination Certificate
2008-04-22
2008-04-22
Kim, Robert (Department: 2881)
Active solid-state devices (e.g., transistors, solid-state diode
Incoherent light emitter structure
Encapsulated
C356S243100
Reexamination Certificate
active
11022481
ABSTRACT:
Parameters of a metrology tool may be determined by measuring a dimension of a feature on a calibration standard with the tool and using the measured dimension and a known traceable value of the dimension to determine a value for the parameter. If the dimension of the feature on the standard has a known traceable value, different standards may be used to calibrate different tools.
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Adler David L.
Bevis Christopher F.
Grella Luca
Lorusso Gian F.
Smith Ian
Isenberg Joshua D.
JDI Patent
Kim Robert
KLA-Tencor Technologies Corporation
Smith II Johnnie L
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